INFICON’s UL6000 Fab PLUS has increased leak testing efficiency

INFICON, a leading manufacturer of leak testing devices, has released the latest generation of mobile leak detectors used in semiconductor manufacturing. The new UL6000 Fab PLUS version adds speed to the process by means the I∙RISE function. A leak detection and fixing process is always followed by an integral leak test of the production tool with a rate-of-rise test. The UL6000Fab PLUS now takes on both jobs: the leak detection and the pressure increase measurement. In this respect, I∙RISE has a huge speed advantage. A conventional vacuum decay test on a large vacuum production tool performed using an external pressure sensor can take several minutes or even hours – the new I∙RISE function completes this test within 10 seconds with the use of helium.

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