Mar 14, 20231 min
The use of the HELICOFLEX® DELTA seal in the vacuum-tight storage and transport of extremely toxic chemicals for semiconductor manufacturing is an ideal solution for transporting toxic chemicals involved in semis manufacturing. The seal is designed with two small ridges that create a highly contact stress in the seal track, making it suitable for ultra-high vacuum applications with low Helium leak rates and passing qualification tests in 2000. The HELICOFLEX® DELTA is an ideal solution for this particular application and has been used to supply thousands of precision metal seals annually.
Article:
Highly toxic chemicals are often used in the semiconductor manufacturing process. Chemical plants supplying these chemicals must ensure storage systems have vacuum-tight seals to store and transport their product to the semiconductor processing location.
A durable helium leak tightness seal was required for a chemical container (canister) subjected to vacuum and positive pressures in one specific application. Due to the volatile nature of the chemicals, plastic elastomer and elastomer seals are not suitable for application.
For this particular application, the HELICOFLEX® DELTA seal was classed as the optimal solution. It includes two small ridges, or “Deltas,” on the seal’s face. The HELICOFLEX® DELTA is the perfect choice due to the high-contact stress in the seal track, making it well-suited for ultra-high vacuum applications that demand extremely low Helium leak rates.
Having first passed the qualification tests in 2000, the HELICOFLEX® DELTA has since achieved Helium leak tightness for both vacuum and at positive pressure conditions and recycling solutions. Technetics supplies thousands of precision metal seals annually to this satisfied customer as increases in the demand for semiconductor processing continue to grow.