China has been considering the need to accelerate the domestic substitution of electronic specialty gases, which are key materials used in the manufacture of semiconductors such as integrated circuits, display panels, photovoltaic energy, and optical fibre cables. Helium is a key component of special gases used in the semiconductor industry. It is used in processes such as ion implantation, etching and cleaning, and thin film deposition, which directly affects the performance and reliability of chips.
Chinese plans for Electronic Specialty Gases
Updated: Mar 12, 2023